Title :
Fab of the Future
Author :
Art, David ; O´Halloran, M.
Author_Institution :
Industrial Design Corporation, Oregon
Keywords :
Art; Buildings; Construction industry; Manufacturing automation; Production facilities; Rails; Robotics and automation; Safety; Semiconductor device manufacture; Slabs;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682467
