DocumentCode
2231444
Title
Comparative study of electrostatically actuated torsion micromirrors: design parameters and performance
Author
Bochobza-Degani, O. ; Feldman, S. ; Nemirovsky, Y.
Author_Institution
Electr. Eng. Dept., Kidron Microelectron. Res. Center, Haifa, Israel
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
91
Lastpage
92
Abstract
This paper will systematically compare the measured results of electrostatic torsion micromirrors with various design parameters, namely: the actuator shape, location of bottom electrode and aspect ratio of the suspending beam. The results of this study are instrumental for the design of torsion micromirrors with new efficient simulation methodology, achieving extended travel range and minimizing the applied voltage required for their operation.
Keywords
electrostatic actuators; micromirrors; torsion; design parameters; electrostatic actuation; optical MEMS; torsion micromirror; Actuators; Displacement measurement; Electrodes; Electrostatic measurements; Instruments; Micromirrors; Optical devices; Semiconductor device modeling; Shape measurement; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031458
Filename
1031458
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