• DocumentCode
    2231470
  • Title

    Technical Feasibility of Self Directed Work Team Concept in Supervisorless Semiconductor Fabrication Environment Using CIM Based Real-Time Productivity Monitors

  • Author

    Joseph, Victor

  • Author_Institution
    VJ Associates, CA
  • fYear
    1993
  • fDate
    18-19 Oct 1993
  • Firstpage
    39
  • Lastpage
    39
  • Keywords
    Fabrication; Law; Legal factors; Monitoring; Semiconductor device manufacture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
  • Type

    conf

  • DOI
    10.1109/ASMC.1993.682475
  • Filename
    682475
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2231470