Full-range linearization of rotary combdrive-actuated micro-mirrors for optical telecommunication

This abstract presents an effective method to linearize the bias-angle response of rotary combdrive actuated micro-mirrors in its full range, including twist of mechanical springs in nonlinear range. Linearization of electrostatic transfer characteristics of rotary combdrives between rotational angle and applied bias is achieved by three distinct sets of rotary combdrives. Two sets of rotary combdrive are dedicated to actuation with respect to linear and nonlinear responses of mechanical springs used in a system, respectively. The other set of rotary combdrive is applied in such a way to eliminate any undesired actuation motion. A theoretical model has been developed to predict the voltage-angle transfer characteristics of the rotary scanning mirrors.