DocumentCode :
2231521
Title :
Open Software Architecture for the Semiconductor Industry
Author :
Kramer, Jim
Author_Institution :
Electronics Industry Business Manager, United States Data Corporation
fYear :
1993
fDate :
18-19 Oct 1993
Firstpage :
45
Lastpage :
55
Keywords :
Application software; Control systems; Electronics industry; Manufacturing processes; Process control; Semiconductor device manufacture; Silicon; Software architecture; Software tools; Technology management;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type :
conf
DOI :
10.1109/ASMC.1993.682477
Filename :
682477
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2231521
بازگشت