DocumentCode
2231521
Title
Open Software Architecture for the Semiconductor Industry
Author
Kramer, Jim
Author_Institution
Electronics Industry Business Manager, United States Data Corporation
fYear
1993
fDate
18-19 Oct 1993
Firstpage
45
Lastpage
55
Keywords
Application software; Control systems; Electronics industry; Manufacturing processes; Process control; Semiconductor device manufacture; Silicon; Software architecture; Software tools; Technology management;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682477
Filename
682477
Link To Document