Polymeric optical components for sensors based on moulding techniques

Author

Gindele, F. ; Novotny, C. ; Koch, A. ; Kunz, S. ; Kufner, S.

Author_Institution

Inst. of Microtechnology Mainz, Germany

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

101

Lastpage

102

Abstract

In this paper we present a fabrication technique for monolithically integrated polymer-based optical sensors built up with diffractive and refractive optical components by injection moulding. Mould inserts, e.g. a toroidal optical mirror with an average surface roughness of R/sub a/<20 nm and a radial shape accuracy as high as 0.2% (0.1 mm) and optical gratings for the visible (VIS) and near infrared (NIR) spectral range with a planarity of /spl plusmn/4 /spl mu/m/cm and an absolute diffraction efficiency as high as /spl eta/=80%, can be realised by ultra-precision machining and electro-forming. All optical elements have been replicated in polycarbonate (PC) with comparable characteristics.

Keywords

diffraction gratings; diffractive optical elements; integrated optics; mirrors; moulding; optical fabrication; optical polymers; optical sensors; 80 percent; diffraction efficiency; diffractive optical component; electroforming; fabrication technique; injection moulding; monolithic integration; optical grating; polycarbonate; polymeric optical sensor; refractive optical component; toroidal optical mirror; ultra-precision machining; Injection molding; Mirrors; Optical device fabrication; Optical devices; Optical diffraction; Optical polymers; Optical refraction; Optical sensors; Rough surfaces; Surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031463

Filename

1031463