An integrated resonant accelerometer microsystem for automotive applications

In the project “IRMA-EU” (IRMA: Integrated Resonant Accelerometer Microsystem for Automotive Applications), a project sponsored by the European Commision under ESPRIT, SensoNor and project partners Autoliv and SINTEF are developing a resonant structure two-chip accelerometer silicon microsystem for automotive applications, the SA30: Crash Sensor for front impacts, with range ±50 g. The project is focusing on the development of key process technologies, product designs and manufacture of functional prototypes. The IRMA project is coordinated with other activities performed by the partners to cover all aspects of research and technology development as well establishment of high volume production capabilities needed for successful product innovation of this new generation of crash sensors. The sensing principle is an acceleration sensitive resonant structure, with an ASIC for resonance control and signal conditioning. Prototypes in silicon of both the sensor chip and the ASIC chip have confirmed the feasibility of the concept, and ramp up to high volume production has now started