• DocumentCode
    2231654
  • Title

    Research Directions for VLSI at Minimum Capital Cost

  • Author

    Bois, Daniel

  • Author_Institution
    GRESSI, CNET chemin du Vieux Chene, France
  • fYear
    1993
  • fDate
    18-19 Oct 1993
  • Firstpage
    77
  • Lastpage
    77
  • Keywords
    Costs; Investments; Manufacturing; Research and development; Semiconductor device manufacture; Semiconductor materials; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
  • Type

    conf

  • DOI
    10.1109/ASMC.1993.682482
  • Filename
    682482
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2231654