Fabrication and investigation of photonic crystal device with MEMS activated defects insertion

Author

Taysing-Lara, Monica ; Dang, Gerard ; Svensson, Stefan ; Zhou, Weimin

Author_Institution

U.S. Army Res. Lab., Adelphi, MD

fYear

2008

fDate

4-9 May 2008

Firstpage

1

Lastpage

2

Abstract

A GaAs/AlGaAs-based photonic-crystal device with MEMS activated insertion/removal of defect posts into/from sub-micron photonic-crystal holes has been fabricated and investigated. This allows the device to actively create/remove point resonators or waveguides in the photonic-crystal membrane.

Keywords

III-V semiconductors; aluminium compounds; crystal defects; gallium arsenide; membranes; micro-optomechanical devices; optical fabrication; optical materials; optical resonators; optical waveguides; photonic crystals; GaAs-AlGaAs; MEMS activated defects insertion; defect posts; fabrication process; optical waveguides; photonic crystal membrane; point resonators; Biomembranes; Etching; Fabrication; Gallium arsenide; Hafnium; Micromechanical devices; Optical resonators; Optical waveguides; Optoelectronic and photonic sensors; Photonic crystals; (130.5296) Photonics Crystal Waveguide; (230.4685) Optical Microelectromechanical Device;

fLanguage

English

Publisher

iet

Conference_Titel

Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on

Conference_Location

San Jose, CA

Print_ISBN

978-1-55752-859-9

Type

conf

Filename

4571273