DocumentCode
2231882
Title
Digital holography for characterization and testing of MEMS structures
Author
Ferraro, P. ; Coppola, G. ; De Nicola, S. ; Finizio, A. ; Grilli, S. ; Iodice, M. ; Magro, C. ; Pierattini, G.
Author_Institution
Ist. per la Microelettronica e i Microsistemi, CNR, Napoli, Italy
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
125
Lastpage
126
Abstract
Digital holography is proposed as a non-contact method for the inspection and characterization of MEMS. The method can be useful for assessing the fabrication process and the functionality as well as the reliability of micromachined structures.
Keywords
holographic interferometry; inspection; micromechanical devices; testing; MEMS characterization; MEMS inspection; MEMS structures reliability; digital holography; fabrication process assessment; micromachined structures; noncontact method; DH-HEMTs; Fabrication; Holography; Image reconstruction; Inspection; Micromechanical devices; Optical interferometry; Optimized production technology; Scanning electron microscopy; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031475
Filename
1031475
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