• DocumentCode
    2232040
  • Title

    Overall fab efficiency [semiconductor manufacturing]

  • Author

    Bonal, Javier ; Ortega, Carlos ; Rios, Luis ; Aparicio, Santiago ; Fernández, Manuel ; Rosendo, María ; Sánchez, Alejandro ; Malvar, Sergio

  • Author_Institution
    AT&T-Microelectron. de Espana, Madrid, Spain
  • fYear
    1996
  • fDate
    12-14 Nov 1996
  • Firstpage
    49
  • Lastpage
    52
  • Abstract
    The constant increase of the capital needed for a semiconductor facility has brought a huge interest in two methodologies: Theory of Constraints (TOC) and Total Productive Maintenance (TPM) which have been shown to be adequate in optimizing the return on capital equipment. This article shows that both methodologies are convergent. The appropriate use of both together can make it possible to maintain productivity improvement rates in the semiconductor business. The Overall Equipment Efficiency (OEE) measurements are the driver metrics for an effective TPM program. OEE measurements are easy to obtain, nevertheless, the analysis of these parameters requires a large amount of accurate data that are difficult to obtain in a production environment. In addition, it needs the dedication of a considerable amount of effort and human resources to improve in all the organizations (production, maintenance, engineering, etc.). It is widely accepted that bottlenecks should be entered in a TPM program, but for non-bottlenecks, it is not easy to determine which machines should enter the program, their target and their impact on the global fab efficiency. In this study we present a systematic method of approaching this problem
  • Keywords
    economics; integrated circuit manufacture; production; semiconductor device manufacture; overall equipment efficiency measurements; overall fab efficiency; production environment; productivity improvements rate; semiconductor manufacturing; theory of constraints; total productive maintenance; Aging; Equations; Radiofrequency interference; Semiconductor device manufacture; Throughput; Yttrium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996
  • Conference_Location
    Cambridge, MA
  • ISSN
    1078-8743
  • Print_ISBN
    0-7803-3371-3
  • Type

    conf

  • DOI
    10.1109/ASMC.1996.557970
  • Filename
    557970