Title :
Statistical modeling of device characteristics with systematic fluctuation
Author :
Okada, Kenichi ; Onodera, Hadetoshi
Author_Institution :
Dept. of Commun. & Comput. Eng., Kyoto Univ., Japan
Abstract :
The fluctuations of device characteristics are usually regarded as a normal distribution. However, if we consider the fluctuation over the whole wafer, the fluctuation cannot be expressed as a normal distribution due to the existence of a systematic component. We propose a model, characterizing the systematic component according to the distance from the center die, which can express the fluctuation over the whole wafer statistically
Keywords :
fluctuations; integrated circuit modelling; semiconductor device models; statistical analysis; device characteristics; semiconductor wafer; statistical modeling; systematic component; systematic fluctuation; Circuits; Distributed computing; Fabrication; Fluctuations; Gaussian distribution; MOSFETs; Semiconductor device modeling; Stochastic processes; Stochastic resonance; Stochastic systems;
Conference_Titel :
Circuits and Systems, 2000. Proceedings. ISCAS 2000 Geneva. The 2000 IEEE International Symposium on
Conference_Location :
Geneva
Print_ISBN :
0-7803-5482-6
DOI :
10.1109/ISCAS.2000.856358
