DocumentCode
2232065
Title
Diamond micro-optics
Author
Karlsson, M. ; Nikolajeff, F.
Author_Institution
The Angstrom Lab., Uppsala Univ., Sweden
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
141
Lastpage
142
Abstract
Diamond has the widest optical transparency window (220 nm and above) and the highest thermal conductivity of all materials known. It is therefore attractive to fabricate diffractive or refractive optical elements in diamond for e.g. high-power laser applications. In this paper we describe the transfer of several micro-optical structures, originally made in resist, into diamond of optical quality. This paper describes for the first time how refractive microlenses and diffractive fan-out elements have been fabricated in diamond.
Keywords
diamond; diffractive optical elements; micro-optics; microlenses; thermal conductivity; 220 nm; C; diamond; diffractive fan-out elements; diffractive optical elements; high-power laser applications; micro-optics; optical quality; optical transparency window; refractive microlenses; refractive optical elements; thermal conductivity; Conducting materials; Dry etching; Gratings; Lenses; Microoptics; Optical device fabrication; Optical diffraction; Optical materials; Optical refraction; Resists;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031483
Filename
1031483
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