Title :
Diamond micro-optics
Author :
Karlsson, M. ; Nikolajeff, F.
Author_Institution :
The Angstrom Lab., Uppsala Univ., Sweden
Abstract :
Diamond has the widest optical transparency window (220 nm and above) and the highest thermal conductivity of all materials known. It is therefore attractive to fabricate diffractive or refractive optical elements in diamond for e.g. high-power laser applications. In this paper we describe the transfer of several micro-optical structures, originally made in resist, into diamond of optical quality. This paper describes for the first time how refractive microlenses and diffractive fan-out elements have been fabricated in diamond.
Keywords :
diamond; diffractive optical elements; micro-optics; microlenses; thermal conductivity; 220 nm; C; diamond; diffractive fan-out elements; diffractive optical elements; high-power laser applications; micro-optics; optical quality; optical transparency window; refractive microlenses; refractive optical elements; thermal conductivity; Conducting materials; Dry etching; Gratings; Lenses; Microoptics; Optical device fabrication; Optical diffraction; Optical materials; Optical refraction; Resists;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031483
