Single layer 2D optical scanners with integrated polymer microlenses

Optical scanners based on microelectromechanical systems (MEMS) technology have been developed for optical communication, scanning display, laser imaging, or biological/medical applications. Since most of biological and optical applications require the transmission of UV/visible light, the micro-lens of optical microscanners requires a material that transmit UV/visible wavelength. In terms of effective optical MEMS fabrication and integration issues single layer-based 2D microlens scanner is preferable in comparison to multilayered polysilicon process or a stacked two-dimensional microlens scanner. In this paper, the new single layer 2D optical scanners are reported. Two actuators and a microlens are integrated in single plane. Photopatternable SU-8 is applied for the mechanical coupling and the electrical isolation in order to achieve the single layer-based 2D optical scanners.