Title :
A CMOS integrated surface micromachined angular rate sensor: its automotive applications
Author :
Sparks, D.R. ; Zarabadi, S.R. ; Johnson, J.D. ; Jiang, Q. ; Chia, M. ; Larsen, O. ; Higdon, W. ; Castillo-Borelley, P.
Author_Institution :
Delco Electron. Corp., Kokomo, IN, USA
Abstract :
A CMOS integrated, surface micromachined angular rate sensor utilizing an electroformed vibrating metal ring structure on a silicon IC has been developed. Substantial signal conditioning circuitry may be included on the IC with the vibrating structure. Tests of the sensor demonstrate that its performance is equivalent to that required for a variety of automotive angular rate applications
Keywords :
CMOS integrated circuits; angular velocity measurement; automotive electronics; integrated circuit technology; micromechanical resonators; microsensors; CMOS integrated surface micromachined angular rate sensor; IC technology; Si; Si IC; angular rate; automotive angular rate applications; automotive applications; electroformed vibrating metal ring structure; performance; signal conditioning circuitry; Automotive applications; Automotive engineering; CMOS process; Circuits; Costs; Micromachining; Resists; Sensor systems and applications; Silicon; Springs;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635235
