A CMOS integrated surface micromachined angular rate sensor: its automotive applications

Author

Sparks, D.R. ; Zarabadi, S.R. ; Johnson, J.D. ; Jiang, Q. ; Chia, M. ; Larsen, O. ; Higdon, W. ; Castillo-Borelley, P.

Author_Institution

Delco Electron. Corp., Kokomo, IN, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

851

Abstract

A CMOS integrated, surface micromachined angular rate sensor utilizing an electroformed vibrating metal ring structure on a silicon IC has been developed. Substantial signal conditioning circuitry may be included on the IC with the vibrating structure. Tests of the sensor demonstrate that its performance is equivalent to that required for a variety of automotive angular rate applications

Keywords

CMOS integrated circuits; angular velocity measurement; automotive electronics; integrated circuit technology; micromechanical resonators; microsensors; CMOS integrated surface micromachined angular rate sensor; IC technology; Si; Si IC; angular rate; automotive angular rate applications; automotive applications; electroformed vibrating metal ring structure; performance; signal conditioning circuitry; Automotive applications; Automotive engineering; CMOS process; Circuits; Costs; Micromachining; Resists; Sensor systems and applications; Silicon; Springs;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635235

Filename

635235