• DocumentCode
    2232199
  • Title

    Challenges in optical MEMS commercialization and MEMS foundry

  • Author

    Chengkuo Lee

  • Author_Institution
    Asia Pacific Microsystems Inc., Hsinchu, Taiwan
  • fYear
    2002
  • fDate
    20-23 Aug. 2002
  • Firstpage
    157
  • Lastpage
    158
  • Abstract
    Optical MEMS has demonstrated numerous applications. To make relative commercialization activities can lead to good financial return, producing optical MEMS devices with reliable technology in an economic scale is a direction to business success. Foundry service may be an alternative to support optical MEMS community to realize their devices in such way.
  • Keywords
    micro-optics; MEMS foundry; optical MEMS commercialization; Commercialization; Foundries; Microelectromechanical devices; Micromechanical devices; Optical devices; Optical films; Optical sensors; Photonic integrated circuits; Production; Sensor arrays;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
  • Conference_Location
    Lugano, Switzerland
  • Print_ISBN
    0-7803-7595-5
  • Type

    conf

  • DOI
    10.1109/OMEMS.2002.1031490
  • Filename
    1031490
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2232199