DocumentCode
2232252
Title
Design and fabrication of 2D Lorentz force actuated micromirrors
Author
Schiffer, M. ; Lalble, V. ; Obermeier, E.
Author_Institution
Microsensor & Microactuator Technol., Tech. Univ. Berlin, Germany
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
163
Lastpage
164
Abstract
Lorentz force actuated micromirrors were designed and fabricated using standard silicon bulk and surface micromachining processes. First tests showed optical tilt angles up to 50 for driving currents of 0.25 mA using an external magnetic field of 1 T.
Keywords
electromagnetic forces; micromachining; micromirrors; 0.25 mA; 1 T; Lorentz force actuated micromirrors; Si; bulk micromachining; driving currents; electromagnetic actuated micromirrors; external magnetic field; optical tilt angles; surface micromachining; Fabrication; Fiber nonlinear optics; Iron; Lorentz covariance; Magnetic analysis; Magnetic fields; Micromirrors; Mirrors; Nonlinear optics; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031493
Filename
1031493
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