Title :
Design and fabrication of 2D Lorentz force actuated micromirrors
Author :
Schiffer, M. ; Lalble, V. ; Obermeier, E.
Author_Institution :
Microsensor & Microactuator Technol., Tech. Univ. Berlin, Germany
Abstract :
Lorentz force actuated micromirrors were designed and fabricated using standard silicon bulk and surface micromachining processes. First tests showed optical tilt angles up to 50 for driving currents of 0.25 mA using an external magnetic field of 1 T.
Keywords :
electromagnetic forces; micromachining; micromirrors; 0.25 mA; 1 T; Lorentz force actuated micromirrors; Si; bulk micromachining; driving currents; electromagnetic actuated micromirrors; external magnetic field; optical tilt angles; surface micromachining; Fabrication; Fiber nonlinear optics; Iron; Lorentz covariance; Magnetic analysis; Magnetic fields; Micromirrors; Mirrors; Nonlinear optics; Silicon;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031493
