Record wavelength tuning of 127 nm for vertical cavity Fabry-Perot filter

Author

Daleiden, J. ; Irmer, S. ; Rangelov, V. ; Romer, F. ; Tarraf, A. ; Prott, C. ; Strassner, M. ; Hillmer, H.

Author_Institution

Inst. of Microstructure Technol. & Analytics, Kassel, Germany

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

169

Lastpage

170

Abstract

Demonstrated micromechanically tunable Fabry-Perot filters with record electromechanical and optical performance. Wavelength tuning of 127nm applying only 7.3V is achieved. The stop-band of these filters is extremely wide (1250nm - 1800nm). These results open new application fields for micromechanically tunable filters, such as spectrometry for environmental and process analysis, medical diagnostics and colorimetry.

Keywords

Fabry-Perot resonators; band-stop filters; micro-optics; optical communication equipment; optical fibre networks; optical filters; optical tuning; wavelength division multiplexing; 1250 to 1800 nm; 7.3 V; colorimetry; medical diagnostics; micromechanically tunable Fabry-Perot filters; process analysis; spectrometry; stop-band; vertical cavity Fabry-Perot filter; wavelength tuning; Air gaps; Biomembranes; Distributed Bragg reflectors; Fabry-Perot; Indium phosphide; Optical filters; Optical interferometry; Optical materials; Optical tuning; Suspensions;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031496

Filename

1031496