Title :
Large area near-IR optical ‘fishnet’ metamaterials
Author :
Dutta, Neilanjan ; Shi, Shouyuan ; Prather, Dennis W.
Author_Institution :
Dept. of Electr. Eng., Univ. of Delaware, Newark, DE, USA
Abstract :
We demonstrate a CMOS compatible fabrication method for large area near-IR fishnet metamaterials. This process involves patterning a template structures using lithography and dry etching, depositing an Au-SiO2-Au stack and template lift-off.
Keywords :
etching; gold; infrared spectra; lithography; metamaterials; optical fabrication; silicon compounds; Au-SiO2-Au; CMOS compatible fabrication method; dry etching; lithography; near-infrared optical Fishnet metamaterials; plasma-enhanced CVD; template lift-off; template structures; Dielectrics; Gold; Lithography; Metamaterials; Optical device fabrication; Optical refraction;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
