• DocumentCode
    2232523
  • Title

    Large area near-IR optical ‘fishnet’ metamaterials

  • Author

    Dutta, Neilanjan ; Shi, Shouyuan ; Prather, Dennis W.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Delaware, Newark, DE, USA
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate a CMOS compatible fabrication method for large area near-IR fishnet metamaterials. This process involves patterning a template structures using lithography and dry etching, depositing an Au-SiO2-Au stack and template lift-off.
  • Keywords
    etching; gold; infrared spectra; lithography; metamaterials; optical fabrication; silicon compounds; Au-SiO2-Au; CMOS compatible fabrication method; dry etching; lithography; near-infrared optical Fishnet metamaterials; plasma-enhanced CVD; template lift-off; template structures; Dielectrics; Gold; Lithography; Metamaterials; Optical device fabrication; Optical refraction;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950329
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2232523