DocumentCode
2232568
Title
Design and fabrication of surface-micromachined spherical mirrors
Author
Max Ti-Kuang Hou ; Ke-Min Liao ; Hong-Zhen Yeh ; Pei-Yuan Hong ; Rongshun Chen
Author_Institution
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
195
Lastpage
196
Abstract
A novel reflective surface-micromachined spherical mirror (SMSM), which can be used for focusing, collecting and imaging without chromatic aberration, and can be easily integrated into the micro optical bench, has been designed, fabricated and characterized.
Keywords
aberrations; integrated optics; micromachining; micromirrors; optical focusing; optical testing; SMSM characterization; chromatic aberration; collecting applications; focusing applications; imaging applications; micro optical bench integration; microoptics; reflective micromirrors; surface-micromachined spherical mirrors; Fabrication; Integrated optics; Micromirrors; Microoptics; Mirrors; Optical design; Optical interferometry; Optical refraction; Optical sensors; Residual stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031508
Filename
1031508
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