• DocumentCode
    2232708
  • Title

    The Significance and Detection of Transmissive Defects on 5X Retitles

  • Author

    Zurbrick, Larry S. ; Henke, Wolfgang

  • Author_Institution
    KLA Instruments Corporation, CA
  • fYear
    1993
  • fDate
    18-19 Oct 1993
  • Firstpage
    124
  • Lastpage
    129
  • Keywords
    Apertures; Automatic testing; Character generation; Computer aided manufacturing; Geometry; Inspection; Lenses; Printing; Resists; Solid modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
  • Type

    conf

  • DOI
    10.1109/ASMC.1993.682495
  • Filename
    682495
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2232708