DocumentCode
2233079
Title
Development of a modal analysis accelerometer based on a tunneling displacement transducer
Author
Scheeper, Patrick R. ; Reynolds, J. Kurth ; Kenny, Thomas W.
Author_Institution
Bruel & Kjaer, Naerum, Denmark
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
867
Abstract
An accelerometer based on a tunneling displacement transducer is presented. The sensor is fabricated using silicon micromachining techniques for fabrication of the seismic mass, the suspension beams and the tunneling tip and electrodes. The demonstrated accelerometer shows linear response from 0.2 mg to 20 g (159 Hz), and shows a 1 kHz bandwidth. The electron tunneling accelerometer can be used in applications where both a high dynamic range and a reasonable bandwidth are required
Keywords
accelerometers; elemental semiconductors; micromachining; microsensors; silicon; tunnelling; vibration measurement; 1 kHz; 159 Hz; Si; bandwidth; dynamic range; linear response; micromachining techniques; modal analysis accelerometer; seismic mass; suspension beams; tunneling displacement transducer; tunneling tip; vibration measurement; Accelerometers; Bandwidth; Electrodes; Electrons; Fabrication; Micromachining; Modal analysis; Silicon; Transducers; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635239
Filename
635239
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