Title :
Flexible, large-area metamaterials fabricated on thin silicon nitride membranes
Author :
Peralta, X.G. ; Arrington, C.L. ; Wanke, M.C. ; Brener, I. ; Williams, J.D. ; Smirnova, E. ; Taylor, A.J. ; O´Hara, J.F. ; Strikwerda, A. ; Averitt, R.D. ; Padilla, W.J.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM
Abstract :
We present terahertz metamaterials fabricated on large-area, free-standing thin (les1 mum) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs.
Keywords :
dielectric losses; metamaterials; optical design techniques; optical fabrication; optical materials; silicon compounds; Si3N4; dielectric loss; terahertz metamaterial fabrication; thin silicon nitride membranes; Biomembranes; Dielectric loss measurement; Dielectric losses; Laboratories; Metamaterials; Optical resonators; Optical sensors; Physics; Resonance; Silicon; (160.3918) Metamaterials; (300.6170) Spectra; (310.6628) Subwavelength structures, nanostructures;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
