Title :
Low frequency drift in tunnel sensors
Author :
Grade, John ; Barzilai, Aaron ; Reynolds, J. Kurth ; Liu, Cheng-Hsien ; Partridge, Aaron ; Miller, L.M. ; Podosek, J.A. ; Kenny, Tom
Author_Institution :
Stanford Univ., CA, USA
Abstract :
For several years, research has been underway on the use of electron tunneling as a displacement transducer in microsensors. This report describes recent measurements of low frequency noise and temperature coefficient of sensitivity tunneling transducers. Since the dominant source frequency noise in these transducers is due to thermal expansion mismatch, small modifications to the device structure should significantly improve the tunneling transducer performance
Keywords :
electric sensing devices; microsensors; semiconductor device noise; thermal expansion; tunnelling; displacement transducer; electron tunneling; low frequency noise; microsensors; source frequency noise; temperature coefficient; thermal expansion mismatch; tunnel sensors; Acoustic transducers; Biomembranes; Counting circuits; Electrodes; Electrons; Frequency; Low-frequency noise; Temperature sensors; Thermal expansion; Tunneling;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635240
