Title :
Longitudinally single mode laser-diode fabricated with Nanoimprint Lithography
Author :
Viheriala, Jukka ; Tommila, Juha ; Rytkonen, Tuomo ; Toikkanen, Lauri ; Dumitrescu, Mihail ; Niemi, Tapio ; Pessa, Markus
Author_Institution :
Optoelectron. Res. Center, Tampere Univ. of Technol., Tampere
Abstract :
We demonstrate diode lasers with integrated feedback gratings using nanoimprint lithography. Our process is developed for epitaxially grown semiconductors. Due to the feedback from the grating longitudinally single mode lasing is achieved.
Keywords :
diffraction gratings; laser beams; laser modes; nanolithography; nanopatterning; ridge waveguides; semiconductor lasers; soft lithography; ultraviolet lithography; waveguide lasers; epitaxially grown semiconductor; integrated feedback gratings; nanoimprint lithography; nanostructured ridge waveguide laser; patterning method; single mode laser-diode; soft UV lithography; Diode lasers; Etching; Gratings; Laser feedback; Laser modes; Lithography; Nanolithography; Optical feedback; Optical waveguides; Waveguide lasers; (220.3740) Lithography; (230.4000) Microstructure fabrication;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
