DocumentCode :
2233465
Title :
High Q broadband copper spiral inductors with Q=45 on proton-bombarded semi-insulating silicon substrate
Author :
Hsu, Heng-Ming ; Su, Jiong-Guang ; Lin, Yo-Sheng ; Tseng, Ming-Hao ; Lin, Jason Chih-Hsien ; Sun, Jack Yuan-Chen ; Tang, Denny ; Yang, Tsing-Tyan ; Tu, Ting-Sien ; Lin, Li-Fu
Author_Institution :
Taiwan Semiconductor Manufacturing Co.
fYear :
2002
fDate :
8-8 Aug. 2002
Firstpage :
113
Lastpage :
116
Keywords :
Conductivity; Copper; Frequency; Inductors; Phase noise; Protons; Q factor; Silicon; Spirals; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
ASIC, 2002. Proceedings. 2002 IEEE Asia-Pacific Conference on
Conference_Location :
Taipei, Taiwan
Print_ISBN :
0-7803-7363-4
Type :
conf
DOI :
10.1109/APASIC.2002.1031545
Filename :
1031545
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2233465
