High Q broadband copper spiral inductors with Q=45 on proton-bombarded semi-insulating silicon substrate

Author

Hsu, Heng-Ming ; Su, Jiong-Guang ; Lin, Yo-Sheng ; Tseng, Ming-Hao ; Lin, Jason Chih-Hsien ; Sun, Jack Yuan-Chen ; Tang, Denny ; Yang, Tsing-Tyan ; Tu, Ting-Sien ; Lin, Li-Fu

Author_Institution

Taiwan Semiconductor Manufacturing Co.

fYear

2002

fDate

8-8 Aug. 2002

Firstpage

113

Lastpage

116

Keywords

Conductivity; Copper; Frequency; Inductors; Phase noise; Protons; Q factor; Silicon; Spirals; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

ASIC, 2002. Proceedings. 2002 IEEE Asia-Pacific Conference on

Conference_Location

Taipei, Taiwan

Print_ISBN

0-7803-7363-4

Type

DOI

10.1109/APASIC.2002.1031545

Filename

1031545

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