Title :
Two-dimensional micromachined gyroscope
Author :
Fujita, T. ; Mizuno, T. ; Kenny, R. ; Maenaka, K. ; Maeda, M.
Author_Institution :
Himeji Inst. of Technol., Hyogo, Japan
Abstract :
In this study a novel cross-shaped micro-gyroscope which detects two orthogonal component of the applied rate is developed. Four nickel cantilever-plates are arranged in a cross that sits above a glass substrate with four fixed electrodes. Upon applying rotations, there result varying amounts of Coriolis acceleration in the vibrating plates which can be detected by corresponding capacitance changes that depend on the separation between the cantilever and fixed electrode. From the results of testing, we obtain an angular rate detection sensitivity of approximately 0.1 mV/(rad/sec) and detect the two orthogonal components of the applied angular rate simultaneously
Keywords :
angular velocity measurement; glass; gyroscopes; microsensors; nickel; substrates; 2D micromachined gyroscope; Coriolis acceleration; Ni cantilever-plates; angular rate detection sensitivity; applied angular rate; cross-shaped microgyroscope; fixed electrodes; glass substrate; orthogonal components; vibrating plates; Acceleration; Capacitance; Electrodes; Etching; Fabrication; Glass; Gyroscopes; Micromachining; Resists; Testing;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635244