Optimization of a High-Volume 200-mm BiCMOS Manufacturing Line

Author

Hook, Terence ; Chen, Bomy ; Starkey, Gorden ; Bhattacharyya, Arup ; Faucher, Margaret ; Racine, Carol ; Willets, Christa ; Eslinger, Steven ; Kulkarni, Subhash ; King, William ; Washburn, Carol ; Piccirillo, Joseph ; Mongeon, Steven ; Johnson, Arthur ; G

Author_Institution

IBM Technology Products, VT

fYear

1993

fDate

18-19 Oct 1993

Firstpage

152

Lastpage

155

Keywords

BiCMOS integrated circuits; CMOS process; CMOS technology; FETs; Implants; Manufacturing; Protection; Resistors; Silicides; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI

Type

DOI

10.1109/ASMC.1993.682502

Filename

682502

Link To Document