DocumentCode
2234487
Title
Near-wavelength resolution extreme ultraviolet imaging with a desktop-size laser
Author
Brizuela, F. ; Brewer, C. ; Martz, D. ; Marconi, Mario ; Rocca, Jorge J. ; Menoni, C.S. ; Chao, W. ; Anderson, E.H. ; Attwood, D.T. ; Vinogradov, A.V. ; Artioukov, I.A. ; Ponomareko, A.G. ; Kondratenko, V.V.
Author_Institution
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO
fYear
2008
fDate
4-9 May 2008
Firstpage
1
Lastpage
2
Abstract
We have realized the first demonstration of imaging in the extreme ultraviolet (EUV) with near-wavelength spatial resolution, 54 nm, using a uniquely compact full-field microscope that can produce images with a single one nanosecond exposure.
Keywords
high-speed optical techniques; laser beam applications; optical microscopy; compact full-field microscope; desktop-size laser; extreme ultraviolet imaging; near-wavelength spatial resolution; single one nanosecond exposure; Charge coupled devices; Image resolution; Laser modes; Lighting; Optical imaging; Optical microscopy; Spatial resolution; Ultraviolet sources; X-ray imaging; X-ray lasers; UV, EUV, and X-ray lasers (140.7240); X-ray imaging (110.7440); X-ray microscopy (180.7460);
fLanguage
English
Publisher
iet
Conference_Titel
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-859-9
Type
conf
Filename
4571385
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