A piezoelectric-plate microgyroscope

Author

He, G.H. ; Nguyen, C.T. ; Hui, J. ; Wong, M.S. ; Ng, A.F.L. ; Luong, H.C. ; Ling, C.

Author_Institution

Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Clear Water Bay, Hong Kong

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

895

Abstract

This paper proposes a novel micro vibrating gyroscope. It is based on the thickness extension vibration mode of a piezoelectric plate. Unlike many piezoelectric gyroscopes, it does not use any elastic element. Its principle is given and the theory is confirmed by an experiment using the macro gyro. The proposed gyroscope is suitable for scaling down and can be integrated with existing IC technology. According to the theoretical calculation, this kind of gyroscope with a 1 mm×1 mm×2 μm piezoelectric plate and an on-chip integrated circuit will have sensitivity of 38.7 mV/V/(°/sec), resolution of 2.58 ×10^-2 (°/sec) and measurement range of 129°/sec

Keywords

gyroscopes; lead compounds; microsensors; piezoceramics; piezoelectric transducers; vibrations; 2 mum; IC technology; MEMS; PZT; PZT crystal; PbZrO3TiO3; macro model; micro vibrating gyroscope; on-chip integrated circuit; piezoelectric gyroscopes; piezoelectric plate; piezoelectric-plate microgyroscope; thickness extension vibration mode; Atmospheric measurements; Electrostatic measurements; Force measurement; Gyroscopes; Helium; Piezoelectric films; Piezoelectric polarization; Rotation measurement; Vibration measurement; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635246

Filename

635246