DocumentCode
2234909
Title
Process Improvements and Empowerment in a Vlsi Pilot Line
Author
Conway, J. ; Maimon, J. ; Nixon, P. ; Polavarapu, M.
Author_Institution
IBM Federal Systems Company, Manassas, Virginia
fYear
1993
fDate
18-19 Oct 1993
Firstpage
161
Lastpage
167
Keywords
ISO standards; Integrated circuit manufacture; Lithography; Manufacturing processes; Qualifications; Semiconductor device manufacture; Six sigma; Time measurement; Total quality management; Very large scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682504
Filename
682504
Link To Document