DocumentCode
2235106
Title
Picometrology of ultra-thin gold film by spinning-disc interferometry
Author
Wang, Xuefeng ; Nolte, D.D.
Author_Institution
Dept. of Phys., Purdue Univ., West Lafayette, IN
fYear
2008
fDate
4-9 May 2008
Firstpage
1
Lastpage
2
Abstract
We obtain the complex refractive index of ultra-thin gold film (down to 20 picometers) on thermal oxide on silicon by the combination of in-line (IL) and differential-phase-contrast (DPC) channels of spinning-disc interferometry (SDI).
Keywords
gold; high-speed optical techniques; light interferometry; measurement by laser beam; metallic thin films; refractive index; Au; complex refractive index; differential-phase-contrast channels; in-line channels; picometrology; spinning-disc interferometry; thermal oxide; ultrathin gold film; Biomedical optical imaging; Gold; High speed optical techniques; Optical films; Optical interferometry; Optical refraction; Optical sensors; Optical variables control; Refractive index; Substrates; (120.3180) Interferometry; (310.6860) Thin films, optical properties;
fLanguage
English
Publisher
iet
Conference_Titel
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-859-9
Type
conf
Filename
4571412
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