Title :
Remote and in-situ calibration of linear scale by low-coherence tandem interferometer
Author :
Hirai, A. ; Kitta, J. ; Kobayashi, F. ; Sasaki, K. ; Matsumoto, H.
Author_Institution :
Nat. Metrol. Inst. of Japan, Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
Abstract :
Technique of transferring length-information between two distantly-located low-coherence-interferometers through a single-mode-optical-fiber for remote and in-situ calibration of linear scale is developed. Results of 200 nm-deviation and 100 nm-standard deviation for 50 mm-length is preliminary achieved.
Keywords :
calibration; light coherence; light interferometers; light interferometry; calibration; low-coherence tandem interferometer; single-mode-optical-fiber; size 50 mm; Calibration; Coherence; Instruments; Interference; Laboratories; Length measurement; Measurement standards; Metrology; Optical fibers; Optical interferometry; (120.3180) Interferometry; (120.3930) Metrological instrumentation;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
