Miniaturized ISFET glucose sensor including a new structure actuation system

Author

Kim, Chang-Soo ; Seo, Hwa-II ; Lee, Chae-Hyang ; Sohn, Byung-Ki

Author_Institution

Sensor Technol. Res. Center, Kyungpook Nat. Univ., Taegu, South Korea

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

911

Abstract

A new principle of an amperometric actuation technique was incorporated in the ISFET glucose sensor. The ISFET is fabricated by the CMOS process and the platinum working electrode is deposited by the lift-off process. A sensor with a specially designed ladder type working electrode exhibits improved operation in response time, response magnitude and detection range. An expectation concerning the reduction of sensor size is also discussed

Keywords

biosensors; chemical sensors; ion sensitive field effect transistors; microactuators; microelectrodes; patient monitoring; CMOS process; ISFET glucose sensor; Pt; amperometric actuation technique; biosensors; detection range; ladder type working electrode; lift-off process; response magnitude; response time; sensor size; structure actuation system; working electrode; Amperometric sensors; Biosensors; Bridges; CMOS technology; Educational technology; Electrodes; Hydrogen; Platinum; Sensor systems; Sugar;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635250

Filename

635250