Title :
Fabrication of high aspect ratio microfluidic devices using direct fs ablation
Author :
Smith, G. ; Karnakis, D. ; Knowles, M. ; Ferguson, A. ; Bennion, I. ; Sugden, K.
Author_Institution :
Sch. of Eng. & Appl. Sci., Aston Univ., Birmingham
Abstract :
We present a single stage direct fs ablation results which show that it is possible to make high quality and high aspect ratio devices in a single stage process using a CAD optimised approach.
Keywords :
CAD; high-speed optical techniques; laser ablation; microfluidics; CAD optimised approach; direct femtosecond ablation; high aspect ratio devices; microfluidic devices; single stage process; Biomedical optical imaging; Fabrication; Laser ablation; Laser stability; Microfluidics; Optical sensors; Power lasers; Prototypes; Scanning electron microscopy; Ultrafast optics; (140.3390) Laser materials processing; (320.2250) Femtosecond phenomena;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
