Title :
A platform for three-dimensional on-chip photonics: Multi-bonded Silicon-on-insulator wafers
Author :
Hosseini, Amir ; Fallahazad, Babak ; Kwong, David N. ; Zhang, Yang ; Tutuc, Emanuel ; Chen, Ray T.
Author_Institution :
Electr. & Comput. Eng. Dept., Univ. of Texas at Austin, Austin, TX, USA
Abstract :
We propose a novel platform for three dimensional photonics. A double layer 1×12 multimode interference coupler is fabricated on a double-bounded Silicon-on-insulator wafer. Optical characterizations confirm low insertion loss and uniform outputs.
Keywords :
integrated optics; optical couplers; silicon-on-insulator; three-dimensional integrated circuits; wafer bonding; double bounded silicon-on-insulator wafer; multibonded silicon-on-insulator wafers; multimode interference coupler; three dimensional on chip photonics; three dimensional photonics; Couplers; Etching; Integrated optics; Optical waveguides; Photonics; Silicon; System-on-a-chip;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
