Title :
Framework for an Advanced Inspection Program
Author :
Cappel, Robert ; Nasr, Mary Beth
Author_Institution :
Digital Equipment Corporation, Massachusetts
Keywords :
Application specific integrated circuits; Atomic force microscopy; Automatic testing; CMOS process; Geometry; Inspection; Manufacturing automation; Product design; Semiconductor device testing; System testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682509
