Title :
Cavity optomechanical sensors for atomic force microscopy
Author :
Srinivasan, Kartik ; Miao, Houxun ; Rakher, Matthew T. ; Davanco, Marcelo ; Aksyuk, Vladimir
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We develop a silicon cavity optomechanical sensor for atomic force microscopy through near-field coupling between a nanocantilever and microdisk cavity. The device exhibits sub-fm/√(Hz) displacement sensitivity, GHz bandwidth, and >; 60 dB of dynamic range.
Keywords :
atomic force microscopy; micro-optomechanical devices; microsensors; optical sensors; silicon; atomic force microscopy; cavity optomechanical sensors; displacement sensitivity; microdisk cavity; nanocantilever; near field coupling; Atom optics; Cavity resonators; Optical coupling; Optical device fabrication; Optical imaging; Optical sensors;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
