Title :
High Q optomechanical resonators in silicon nitride nanophotonic circuits
Author :
Fong, King Yan ; Pernice, Wolfram ; Li, Mo ; Tang, Hong
Author_Institution :
Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
Abstract :
We demonstrate nanophotonic circuits for integration of high Q micromechanical resonators and nanooptical components. Mechanical resonance of nanostring is actuated and readout by optomechanical interaction. Quality factor up to 696,000 is obtained.
Keywords :
micromechanical resonators; nanophotonics; silicon compounds; SiN; high Q micromechanical resonators; high Q optomechanical resonators; mechanical resonance; nanooptical components; nanostring; optomechanical interaction; quality factor; silicon nitride nanophotonic circuits; Harmonic analysis; Nanoscale devices; Optical device fabrication; Optical sensors; Optical waveguides; Q factor; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
