Title :
Electromechanically tunable photonic crystal cavities
Author :
Midolo, L. ; van Veldhoven, P.J. ; Nötzel, R. ; Dundar, M.A. ; Fiore, A.
Author_Institution :
COBRA Res. Inst., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
We report a novel approach to tuning photonic crystal cavities based on the electrostatic actuation of coupled InGaAsP membranes and we report up to 7 nm mode shift with 8.6 V bias.
Keywords :
III-V semiconductors; electrostatic actuators; gallium compounds; indium compounds; nanoelectromechanical devices; nanophotonics; optical fabrication; photonic crystals; InGaAsP; coupled membrane; electromechanically tunable photonic crystal cavities; electrostatic actuation; voltage 8.6 V; Cavity resonators; Etching; Fabrication; Indium phosphide; Photonic crystals; Q factor; Tuning;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
