• DocumentCode
    2236435
  • Title

    Electromechanically tunable photonic crystal cavities

  • Author

    Midolo, L. ; van Veldhoven, P.J. ; Nötzel, R. ; Dundar, M.A. ; Fiore, A.

  • Author_Institution
    COBRA Res. Inst., Eindhoven Univ. of Technol., Eindhoven, Netherlands
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report a novel approach to tuning photonic crystal cavities based on the electrostatic actuation of coupled InGaAsP membranes and we report up to 7 nm mode shift with 8.6 V bias.
  • Keywords
    III-V semiconductors; electrostatic actuators; gallium compounds; indium compounds; nanoelectromechanical devices; nanophotonics; optical fabrication; photonic crystals; InGaAsP; coupled membrane; electromechanically tunable photonic crystal cavities; electrostatic actuation; voltage 8.6 V; Cavity resonators; Etching; Fabrication; Indium phosphide; Photonic crystals; Q factor; Tuning;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950470
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2236435