Title :
MEMS chemical sensors using waveguide Fabry-Perot microcavities
Author :
Pruessner, Marcel W. ; Stievater, Todd H. ; Rabinovich, William S. ; McGill, R.A. ; Stepnowski, J.L.
Author_Institution :
NRL, Crofton, MD
Abstract :
We demonstrate waveguide Fabry-Perot microcavities coupled to in-plane microbeam resonators. The microcavities enable measurement of mechanical resonant frequency shifts resulting from mass loading due to analyte sorption. High selectivity sensor arrays are possible.
Keywords :
chemical sensors; microcavities; micromechanical devices; resonators; MEMS chemical sensors; analyte sorption; mass loading; microbeam resonators; waveguide Fabry-Perot microcavities; Chemical sensors; Fabry-Perot; Frequency measurement; Mechanical sensors; Mechanical variables measurement; Microcavities; Micromechanical devices; Optical sensors; Optical waveguides; Resonance; 130.6010 (sensors); 230.3120 (integrated optics devices); 230.4685 (Optical microelectromechanical devices); 230.5750 (resonators);
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
