DocumentCode
2236714
Title
Implementation of Real-Time Particle Detection at Post Metal Deposition
Author
Gildersleeve, Karen ; Gonzales, Simon
Author_Institution
Motorolar Inc., Mesa Az
fYear
1993
fDate
18-19 Oct 1993
Firstpage
194
Lastpage
197
Keywords
Aluminum; Contamination; Etching; Inspection; Particle beam measurements; Particle beams; Particle measurements; Performance evaluation; Reflectivity; Vacuum systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682511
Filename
682511
Link To Document