Title :
Implementation of Real-Time Particle Detection at Post Metal Deposition
Author :
Gildersleeve, Karen ; Gonzales, Simon
Author_Institution :
Motorolar Inc., Mesa Az
Keywords :
Aluminum; Contamination; Etching; Inspection; Particle beam measurements; Particle beams; Particle measurements; Performance evaluation; Reflectivity; Vacuum systems;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682511
