• DocumentCode
    2236919
  • Title

    Isolating the Killer Defect: Process Analysis using Particle Map to Probe Map Correlation

  • Author

    Carman, Eric ; Lawrence, Chris ; Nair, Raj ; Sanchez, Gerald

  • Author_Institution
    Motorola, Inc Logic and Analog Technology Group, MD
  • fYear
    1993
  • fDate
    18-19 Oct 1993
  • Firstpage
    198
  • Lastpage
    200
  • Keywords
    Application specific integrated circuits; Etching; Failure analysis; Isolation technology; Light scattering; Logic; Particle measurements; Particle scattering; Probes; Semiconductor device modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
  • Type

    conf

  • DOI
    10.1109/ASMC.1993.682512
  • Filename
    682512
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2236919