Title :
Combined resistive and calorimetric sensing of gases using a single silicon micromachined device
Author :
Shin, Hyun Woo ; Lloyd, Craig ; Gardner, Julian W.
Author_Institution :
Dept. of Eng., Warwick Univ., Coventry, UK
Abstract :
In this paper we report on the fabrication, testing and implementation of a planar silicon micromachined device that can be simultaneously operated as a low power microcalorimeter and a resistive gas sensor. A “dual-mode” sensor has therefore been designed to maximise application flexibility and minimise production costs
Keywords :
calorimetry; elemental semiconductors; gas sensors; micromachining; microsensors; silicon; Si; calorimetric sensing; chemoresistor; dual-mode sensor; microcalorimeter; micromachined devices; production costs; resistive sensing; Biomembranes; Electrodes; Fabrication; Gas detectors; Gases; Platinum; Resists; Silicon; Sputter etching; Thin film sensors;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635256
