• DocumentCode
    2237355
  • Title

    Optimisation study of micro cantilevers for switching of photonic band gap crystals

  • Author

    Abdulla, S. M Chakkalakkal ; Berenschot, E. ; de Boer, M.J. ; Kauppinen, L.J. ; de Ridder, R.M. ; Krijnen, Gijs J M

  • Author_Institution
    MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
  • fYear
    2009
  • fDate
    15-19 Sept. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We propose to use electrostatically actuated micro bimorph cantilevers with tips for nanometric perturbations in the evanescent field of various resonators and photonic band gap crystals (PBG) using a self aligning technology. Since in PBG and in other high optical index contrast structures the interaction of evanescent field with mechanical elements start to play a role typically with a distance <400 nanometers, the required cantilever strokes for switching c an be accordingly small. This allows for fabrication of relative stiff cantilevers with resonance frequencies in the MHz range. In this contribution we describe the technology for such devices, the optimization studies of the cantilever designs and measurements of mechano-optical interactions using an AFM based cantilever.
  • Keywords
    cantilevers; electrostatic actuators; micro-optomechanical devices; micromechanical resonators; microswitches; optical switches; photonic crystals; AFM; electrostatic actuator; evanescent field; mechano-optical interactions; microbimorph cantilevers; nanometric perturbations; photonic band gap crystals; resonance frequencies; resonators; switching; Chromium; Compressive stress; Photonic band gap; Photonic crystals; Resonance; Resonant frequency; Silicon; Sputter etching; Tensile stress; Thermal stresses; MEMS; bimorph; photonic band gap crystal;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics in Switching, 2009. PS '09. International Conference on
  • Conference_Location
    Pisa
  • Print_ISBN
    978-1-4244-3857-0
  • Electronic_ISBN
    978-1-4244-3856-3
  • Type

    conf

  • DOI
    10.1109/PS.2009.5307803
  • Filename
    5307803