DocumentCode
2237355
Title
Optimisation study of micro cantilevers for switching of photonic band gap crystals
Author
Abdulla, S. M Chakkalakkal ; Berenschot, E. ; de Boer, M.J. ; Kauppinen, L.J. ; de Ridder, R.M. ; Krijnen, Gijs J M
Author_Institution
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
fYear
2009
fDate
15-19 Sept. 2009
Firstpage
1
Lastpage
2
Abstract
We propose to use electrostatically actuated micro bimorph cantilevers with tips for nanometric perturbations in the evanescent field of various resonators and photonic band gap crystals (PBG) using a self aligning technology. Since in PBG and in other high optical index contrast structures the interaction of evanescent field with mechanical elements start to play a role typically with a distance <400 nanometers, the required cantilever strokes for switching c an be accordingly small. This allows for fabrication of relative stiff cantilevers with resonance frequencies in the MHz range. In this contribution we describe the technology for such devices, the optimization studies of the cantilever designs and measurements of mechano-optical interactions using an AFM based cantilever.
Keywords
cantilevers; electrostatic actuators; micro-optomechanical devices; micromechanical resonators; microswitches; optical switches; photonic crystals; AFM; electrostatic actuator; evanescent field; mechano-optical interactions; microbimorph cantilevers; nanometric perturbations; photonic band gap crystals; resonance frequencies; resonators; switching; Chromium; Compressive stress; Photonic band gap; Photonic crystals; Resonance; Resonant frequency; Silicon; Sputter etching; Tensile stress; Thermal stresses; MEMS; bimorph; photonic band gap crystal;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics in Switching, 2009. PS '09. International Conference on
Conference_Location
Pisa
Print_ISBN
978-1-4244-3857-0
Electronic_ISBN
978-1-4244-3856-3
Type
conf
DOI
10.1109/PS.2009.5307803
Filename
5307803
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