DocumentCode :
2237355
Title :
Optimisation study of micro cantilevers for switching of photonic band gap crystals
Author :
Abdulla, S. M Chakkalakkal ; Berenschot, E. ; de Boer, M.J. ; Kauppinen, L.J. ; de Ridder, R.M. ; Krijnen, Gijs J M
Author_Institution :
MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands
fYear :
2009
fDate :
15-19 Sept. 2009
Firstpage :
1
Lastpage :
2
Abstract :
We propose to use electrostatically actuated micro bimorph cantilevers with tips for nanometric perturbations in the evanescent field of various resonators and photonic band gap crystals (PBG) using a self aligning technology. Since in PBG and in other high optical index contrast structures the interaction of evanescent field with mechanical elements start to play a role typically with a distance <400 nanometers, the required cantilever strokes for switching c an be accordingly small. This allows for fabrication of relative stiff cantilevers with resonance frequencies in the MHz range. In this contribution we describe the technology for such devices, the optimization studies of the cantilever designs and measurements of mechano-optical interactions using an AFM based cantilever.
Keywords :
cantilevers; electrostatic actuators; micro-optomechanical devices; micromechanical resonators; microswitches; optical switches; photonic crystals; AFM; electrostatic actuator; evanescent field; mechano-optical interactions; microbimorph cantilevers; nanometric perturbations; photonic band gap crystals; resonance frequencies; resonators; switching; Chromium; Compressive stress; Photonic band gap; Photonic crystals; Resonance; Resonant frequency; Silicon; Sputter etching; Tensile stress; Thermal stresses; MEMS; bimorph; photonic band gap crystal;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photonics in Switching, 2009. PS '09. International Conference on
Conference_Location :
Pisa
Print_ISBN :
978-1-4244-3857-0
Electronic_ISBN :
978-1-4244-3856-3
Type :
conf
DOI :
10.1109/PS.2009.5307803
Filename :
5307803
Link To Document :
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