Title :
A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide
Author :
Pham, S.V. ; Dijkstra, M. ; van Wolferen, H.A.G.M. ; Pollnau, M. ; Krijnen, G.J.M. ; Hoekstra, H.J.W.M.
Author_Institution :
Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands
Abstract :
A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.
Keywords :
integrated optics; micro-optics; microsensors; optical sensors; optical waveguides; Si3N4; grated waveguide; integrated mechano-optical sensor; microbridge; Absorption; Integrated optics; Optical device fabrication; Optical interferometry; Optical sensors; Optical surface waves; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
