• DocumentCode
    2237394
  • Title

    Advanced SIL System with High NA and Large Tolerance

  • Author

    Won, Kitak ; Choi, Narak ; Lee, Jiyeon ; Shin, Yunsup ; Lee, Kyungeon ; Milster, Tom D. ; Lee, Jaihyung ; Kim, Jaisoon

  • Author_Institution
    Sch. of Phys. & Astron., Seoul Nat. Univ., Kwanak-gu
  • fYear
    2007
  • fDate
    26-31 Aug. 2007
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    To achieve high NA and large tolerance, we designed a new SIL system (optimum SIL) which combines each advantages of the hyper SIL and the hemi SIL system. Also using micro-SIL system we can improve its performance. There are simulation results which support our works.
  • Keywords
    lenses; optical design techniques; hemi SIL system; hyper SIL system; numerical aperture; optical design; solid immersion lens; Lenses; Memory; Optical design; Optical refraction; Optical sensors; Optical variables control; Optimized production technology; Refractive index; Solids; Stability;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
  • Conference_Location
    Seoul
  • Print_ISBN
    978-1-4244-1173-3
  • Electronic_ISBN
    978-1-4244-1174-0
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2007.4391108
  • Filename
    4391108
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2237394