An Evaluation of Surface Finish and Flush-Up Procedures for High Purity HCI Gas Distribution Systems

Author

Duguid, Rebecca ; Coder, Skip ; Binder, Robin ; Hertzler, B.

Author_Institution

Millipore Corporation, Bedford, MA

fYear

1993

fDate

18-19 Oct 1993

Firstpage

204

Lastpage

210

Keywords

Contamination; Corrosion; Gases; Human computer interaction; Impurities; Infrared spectra; Moisture; Purification; Steel; Surface finishing;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI

Type

DOI

10.1109/ASMC.1993.682514

Filename

682514

Link To Document