Title :
Cost Reduction in U.s. Semiconductor Fabrication Environment
Author_Institution :
VJ Associates, Fremont, California
Keywords :
Control systems; Costing; Costs; Fabrication; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682515