Title :
Colored timed Petri-net and GA based approach to modeling and scheduling for wafer probe center
Author :
Lin, Shun-Yu ; Fu, Li-Chen ; Chiang, Tsung-Che ; Shen, Yi-Shiuan
Author_Institution :
Dept. of Comput. Sci. & Inf. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
In this paper, we propose architecture to simulate wafer probe. We use a modeling tool named CTPN (colored-timed Petri nets) to model all testing flow. With CTPN model, we can predict the delivery date of any specific product under some scheduling policies efficiently and precisely. In the scheduling phase, we combine two popular methods to contract high-quality schedules. One is to select machines for lots and the other is to select lots for machines. In each method, we use the GA-based approach to search for the optimal combination of a number of heuristic rules. This CTPN-based GA scheduler and helps us to find the good solution so as to meet the requirements in the complicated environment.
Keywords :
Petri nets; genetic algorithms; scheduling; semiconductor device manufacture; semiconductor process modelling; colored time Petri-net; genetic algorithm approach; heuristic rules; machine selection; scheduling phase; wafer probe center; Fabrication; Integrated circuit modeling; Job shop scheduling; Petri nets; Predictive models; Probes; Processor scheduling; Scheduling algorithm; Semiconductor device modeling; Testing;
Conference_Titel :
Robotics and Automation, 2003. Proceedings. ICRA '03. IEEE International Conference on
Print_ISBN :
0-7803-7736-2
DOI :
10.1109/ROBOT.2003.1241793